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Mechatronics
Precision Positioning Stages
IKO Mechatronics series was developed through the integration of precision machining technology and electronics. Precision positioning tables incorporate a linear motion rolling guide and ball screw or motor between the bed and slide table.
A wide range of products are available in either the module type or high-precision type. They play an important role in a variety of industries that require equipment with positioning mechanisms such as semiconductor manufacturing equipment, flat panel display manufacturing equipment, and other precision equipment needs. Having the positioning table and electrical control components in one helps reduce design and assembly processes.
Ball Screw & Belt Drive
Model Number | Travel Length | Speed | Carrying Mass | Repeatability | |
|---|---|---|---|---|---|
TU Robust & Heavy Duty | up to 1,400 mm | up to 1,860 mm/s | up to 154 kg | up to +/- 2 microns | |
TE Aluminum base - Light Weight | up to 800 mm | up to 1,860 mm/s | up to 36 kg | up to +/- 2 microns | |
TX Ultimate Accuracy | up to 800 mm | up to 500 mm/s | up to 536 kg | up to +/- 0.5 microns | |
TS Compact & High Accuracy | up to 250 mm | up to 250 mm/s | up to 310 kg | up to +/- 2 microns | |
TC Clean Room - ISO class 3 | up to 800 mm | up to 1,000 mm/s | up to 36 kg | up to +/- 2 microns | |
TM Micro Precision | up to 60 mm | up to 75 mm/s | up to 1.5 kg | up to +/- 1 microns | |
TSLB Belt Drive | up to 1,200 mm | up to 1,500 mm/s | up to 62 kg | up to +/- 70 microns |
TU series - Robust & Heavy Duty
Ball screw drive
Overall Height 25 mm - 110 mm
Travel Length up to 1,400 mm
Speed up to 1,860 mm/s
Carrying Mass up to 154 kg
Repeatability up to +/- 2 microns
Select from Flange type or Block type
Motor folding back option is available to save space
Add bellows for Dust protection
Add C-lube for Maintenance-free
XY bracket is available
NEMA11C, 17C, 23D, 34D, 42D
TE series - Aluminum, Light Weight
Ball screw drive
Overall Height 26 mm - 68 mm
Travel Length up to 800 mm
Speed up to 1,860 mm/s
Carrying Mass up to 36 kg
Repeatability up to +/- 2 microns
Built with Maintenance-free Linear Way and Ball Screw
Select from Flange type or Block type
Motor folding back option is available to save space
Add bridge cover for Style & Safety
NEMA17C, 23D, 34D
TX series - Ultimate Accuracy
Ball screw drive
Overall Height 65 mm - 140 mm
Travel Length up to 800 mm
Speed up to 500 mm/s
Carrying Mass up to 536 kg
Repeatability up to +/- 0.5 microns
Positioning Accuracy up to 0.3 microns
Attitude Accuracy up to 5 sec
Parallelism up to 0.5 microns
Single & Double axis specifications available
Roller-type linear guides for Ultra-high accuracy and Rigidity
Built with Maintenance-free Linear Way and Ball Screw
Select Absolute type or Incremental type linear encoder
TS series - Compact & High Accuracy
Ball screw drive
Overall Height 35 mm - 150 mm
Travel Length up to 250 mm
Speed up to 250 mm/s
Carrying Mass up to 310 kg
Repeatability up to +/- 2 microns
Positioning Accuracy up to 0.5 microns
Parallelism up to 0.5 microns
Anti-creep cage Crossed Roller Way
Single & Double axis specifications available
Optimal for work conducted directly on the table's upper surface
TC series - Cleanroom ISO Class 3
Ball screw drive
Overall Height 50 mm - 67 mm
Travel Length up to 800 mm
Speed up to 1,000 mm/s
Carrying Mass up to 36 kg
Repeatability up to +/- 2 microns
Compatible with a class 3 cleanroom
Lightweight, low-profile and compact table
Built with Maintenance-free Linear Way and Ball Screw
High corrosion resistance with anodized aluminum alloy and stainless steel parts
TM series - Micro Precision
Ball screw drive
Overall Height 20 mm
Travel Length up to 60 mm
Speed up to 75 mm/s
Carrying Mass up to 1.5 kg
Repeatability up to +/- 1 microns
Ultra-small positioning table with a width of 17mm
Corrosion resistant stainless-steel is used for all major components
Select from AC servomotor and Stepper Motor
TSLB series - Belt Drive
Timing Belt drive
Overall Height 65 mm - 90 mm
Travel Length up to 1,200 mm
Speed up to 1,500 mm/s
Table Width 90 - 170 mm
Carrying Mass up to 62 kg
Repeatability up to +/- 70 microns
High-speed and Long stroke positioning table
Comes with a Bridge Cover
Stable, high running accuracy
Linear Motor Stages
Image | Product Series | Travel Length | Speed | Load Mass | Repeatability |
|---|---|---|---|---|---|
NT Single Axis Stage | up to 120 mm | up to 1,300 mm/s | up to 5 kg | up to +/- 0.1 microns | |
LT Long Stroke Linear Motor Stages | up to 2,760 mm | up to 3,000 mm/s | up to 90 kg | up to +/- 0.5 microns | |
NT...XZ Pick & Place Unit | up to 45 mm | up to 1,300 mm/s | up to 0.2 kg | up to +/- 0.5 microns |
NT series - Nano Linear Motor Single Axis Stage
Sectional Height 8 mm – 25 mm
Table Width 30 mm – 88 mm
Stroke Length up to 120 mm
Speed up to 1,300 mm/s
Repeatability up to 0.1 μm
Load Mass up to 5 kg
Maximum Thrust up to 36 N
No cable drag. Moving magnet type
Select Anti-creep cage crossed roller type for Higher accuracy
Two-axis parallel or perpendicular combination is available
Supports motion networks EtherCAT, SSCNETⅢ/H, MECHATROLINK, and RTEX
Optical linear encoders are installed
LT series - Long Stroke Linear Motor Stage
Sectional Height 30 mm – 80 mm
Sectional Width 100 mm – 190 mm
Stroke Length up to 2,760 mm
Speed up to 3,000 mm/s
Repeatability up to 0.5 μm
Load Mass up to 90 kg
Maximum Thrust up to 900 N
Low-profile design with small optical linear encoder
High static stability with advanced servo technology
High acceleration/deceleration because of light weights and high thrust
Select Air cooling option to improve tact time.
NT...XZ series - Linear Motor Pick & Place Unit
Sectional Thickness 18 mm – 29.5 mm
Stroke Length up to 45 mm
Speed up to 1,300 mm/s
Repeatability up to 0.5 μm
Load Mass up to 0.2 kg
Maximum Thrust up to 70 N
Optical linear encoders for both axis
Ultrathin and space-saving
High-tact positioning
Select Air cooling option to improve tact time.
Rotary and Other Stages
SA.../S series - Alignment Direct Drive Stage
Direct drive
Operating Angle: 50°, 60°, 280°, 360°
Table Diameter 65 mm to 200 mm
Allowable load mass up to 21 kg
Speed up to 720 deg/sec
Repeatability up to +/-0.5 sec
Stage Height 22 mm to 30 mm
XY-Theta setup is available
High resolution and high responsiveness
AT series - Alignment Stage
Ball Screw
Operating Angle up to +/-10°
Table Diameter up to 300 mm
Sectional Height of 49.5 mm to 66 mm
Carrying mass up to 44 kg
Repeatability up to +/- 1 sec
Low-profile and High Rigidity
XY-Theta arrangement is available
SK series - Rotary Stage
Worm gear drive
Operating Angle 360°
Table Diameter of 115 mm
Allowable load of 50 N
Repeatability up to 7.2 sec|
Sectional Height 30 mm – 35 mm
Low Profile and High Rigidity
Table deflection 5 μm or less
AM series - Alingment Module
Precision Ball Screw Drive
Stroke length up to 120 mm
Speed up to 250 mm/s
Carrying mass up to 210 kg
Repeatability up to +/- 2 μm
Gives you the flexibility to create your own custom alignment stages.
Supports for platforms up to 2,000 mm square
TZ series - Elevating Stage
Driven by Precision Ball Screw
Speed up to 125 mm/s
Carrying mass up to 160 kg
Repeatability up to +/- 1 μm
Stroke length up to 24 mm
Available in two table sizes: ⬜120 mm & ⬜200 mm
Wedge reduction ratios: 1:2 or 1:4
Unique wedge mechanism ensures compact and high-accuracy vertical positioning.
Built-in C-Lube lubrication components for long life and maintenance-free operation.
Tables may be combined with an IKO CT precision positioning table for XYZ axis positioning.
PD series - Parallel Drive Stage
Driven by Precision Ball Screw
Speed up to 50 mm/s
Carrying mass up to 5 kg
Repeatability up to +/- 2 μm
Stroke length up to 10 mm
Lightweight, compact and extremely low sectional height of 50 mm.
Built-in C-Lub lubrication components for long life and maintenance-free operation.
Motors are arranged in parallel, requiring no additional wiring or cable conveyors.
Arc movement in addition to XY movements.
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